发明名称 Methods of fabricating single electron transistors in which the thickness of an insulating layer defines spacing between electrodes
摘要 Single-electron transistors include first and second electrodes and an insulating layer between them on a substrate. The insulating layer has a thickness that defines a spacing between the first and second electrodes. At least one nanoparticle is provided on the insulating layer. Accordingly, a desired spacing between the first and second electrodes may be obtained without the need for high resolution photolithography. An electrically-gated single-electron transistor may be formed, wherein a gate electrode is provided on the at least nanoparticle opposite the insulating layer end. Alternatively, a chemically-gated single-electron transistor may be formed by providing an analyte-specific binding agent on a surface of the at least one nanoparticle. Arrays of single-electron transistors also may be formed on the substrate. The single-electron transistors may be fabricated by forming a post electrode on a substrate, conformally forming an insulating layer on at least a portion of the post electrode and conformally forming a second electrode on at least a portion of the insulating layer opposite the post electrode. At least one nanoparticle is placed on the insulating layer, between the post electrode and the second electrode.
申请公布号 US2003025133(A1) 申请公布日期 2003.02.06
申请号 US20020244860 申请日期 2002.09.17
申请人 BROUSSEAU LOUIS C. 发明人 BROUSSEAU LOUIS C.
分类号 G01N27/414;H01L29/06;H01L29/66;H01L29/76;H01L29/78;H01L29/786;(IPC1-7):H01L27/108;H01L31/112;H01L21/823 主分类号 G01N27/414
代理机构 代理人
主权项
地址