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发明名称
Verfahren zur Herstellung einer hochintegrierten Schaltung
摘要
申请公布号
DE69718134(D1)
申请公布日期
2003.02.06
申请号
DE19976018134
申请日期
1997.10.23
申请人
FUJITSU LTD., KAWASAKI
发明人
YOSHIKAWA, SATORU
分类号
G01R31/28;G06F17/50;H01L21/82;H01L27/02;(IPC1-7):H01L27/02
主分类号
G01R31/28
代理机构
代理人
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地址
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