Method of charging hole with fluid material

摘要

A method of charging a hole (24) in a substrate (23) with fluid material (50) comprises the steps of supplying the fluid material (50) onto a surface of the substrate (23); and forcing the fluid material (50) into the hole (24) along at least three different directions on the surface of the substrate (23) to charge the hole (24) with the fluid material (50). The forcing step may comprise using a forcing means (9) placed on the surface of the substrate (23) in forcing the fluid material (50) into the hole (24); and rotating the forcing means (9) about an axis perpendicular to the surface of the substrate (23) and moving the axis of rotation of the forcing member (9) along the surface of the substrate (23) to force the fluid material (50) into the hole (24) along the at least three different directions.