SYSTEM AND METHOD FOR TRANSFERRING WAFER, AND AUTOMATIC GUIDED VEHICLE SYSTEM

摘要

PURPOSE: To shorten the time required for posture alignment of a wafer in the transfer process and improve the wafer transfer efficiency in a wafer transfer system. CONSTITUTION: The central position of a wafer 10 mounted on a mounting platform 41 is calculated, an angle of rotation of the mounting platform 41 until the wafer 10 takes a fixed posture is calculated based on the calculation result and the positional information of an ID mark 11 received in advance, and an amount of telescopic motion of a transfer arm 30 and an angle of rotation of a turntable 39 until the ID mark 11 of the wafer 10 takes a fixed position and posture and the wafer 10 is set with respect to an OCR 43 are calculated. Then, the calculated angle of rotation of the mounting platform 41 is corrected based on the angle of rotation of the turntable 39, the wafer is rotated by rotating the mounting platform 41 by the amount of the corrected angle of rotation, and the wafer 10 is transferred to the OCR 43 by a transfer device 3.