WAFER INDEX ARM AND SEMICONDUCTOR FABRICATION DEVICE USING THE SAME

摘要

PURPOSE: A wafer index arm is provided to install a bar having an index on the surface and a sensing unit for sensing a position of the bar on one sidewall of the wafer index arm, thereby enabling an operator to know a wrong operation of the arm before an index arm loads a wafer. CONSTITUTION: A wafer index arm(100) indexes a wafer between a wafer unloading unit and a cleaning unit within a spin scrubber. The wafer index arm(100) includes a set board(110) and a body(120). The wafer is set on the set board(110). The body(120) supports the set board(110). The body(120) easily unloads the wafer within a wafer cassette. The set board(110) is rotatable at 180 degrees. A bar(130) and a sensing unit(140) are installed in the body(120). The bar(130) measures a vertical migration distance of the body(120). The sensing unit(140) senses a migration distance of the bar(130).