APPARATUS FOR STORING WAFERS

摘要

PURPOSE: An apparatus for storing wafers is provided to prevent contamination of the wafers due to particles by using a plurality of guard rails and a plurality of air holes between the guard rails. CONSTITUTION: A wafer storage apparatus includes a plurality of loading plates(10). The loading plates(10) are connected by a plurality of vertical connection bars(20). A plurality of guide members(30) are used for guiding a plurality of carriers to the loading plates(10) in a predetermined interval. Each guide member(30) is formed with a couple of guard rails(31). At this time, the guide rail(31) is formed with acetal resin. The height of the guard rail(31) is lower than the height of a support projection of the carrier. A plurality of air holes(40) are formed at the guide members(30).