| 摘要 |
PURPOSE: To provide an Al alloy member for a chamber, superior in gas corrosion resistance, plasma resistance, and corrosive solution resistance. CONSTITUTION: The Al alloy member superior in corrosion resistance having an anodic oxide coating consisting of a porous layer and a barrier layer without a pore, is characterized in that at least a part of a structure of the barrier layer is boehmite and/or quasi-boehmite, that a dissolution rate of the film according to a phosphoric acid-chromic acid immersion test (JISH8683-2) is 100 mg/dm¬2/15 min or less, and further that an area rate of corrosion generated after being left in a gas atmosphere of 5% Cl2-Ar (at 400°C) for four hours is 10% or less. |
