发明名称 |
PROBE CARD DEVICE AND PROBE FOR USE THEREIN |
摘要 |
<p>A probe (1A) has a cutting blade portion (2) at a tip end portion that is brought into contact with a pad electrode (5). The cutting blade portion (2) has a cutting edge (2)a that is in a plane parallel to the direction of sliding over a pad electrode, when the edge is brought into contact with pad electrode (5). The cutting edge (2a) is formed to have such a shape that comes closer to pad electrode (5) from the front side to the rear side along the direction of progress, at a front edge in the direction of progress as it slides over pad electrode (5). Thus, as the cutting edge (2a) cuts into the insulating coating (7) formed on the surface of pad electrode (5), a probe card apparatus can be provided that ensures satisfactory electrical conduction between probe (1A) and pad electrode (5). <IMAGE></p> |
申请公布号 |
EP1281973(A1) |
申请公布日期 |
2003.02.05 |
申请号 |
EP20010900773 |
申请日期 |
2001.01.15 |
申请人 |
INNOTECH CORPORATION |
发明人 |
YOSHIDA, MINORU;OHASHI, SEIICHI |
分类号 |
G01R1/067;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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