发明名称 Device for exposure of the peripheral area of a film circuit board
摘要 A device for exposure of the peripheral area of a film circuit board in which the edge of the copper foil can be exactly determined and the position of the irradiation area can be controlled with high precision is obtained in that a resist (R) in the peripheral area of a conductive foil located on a film circuit board (TP) is irradiated with exposure light and is thus exposed, while the film circuit board (TP) in which there are perforation holes (PH) with a stipulated pitch to one another, is transported, in that an optical detector (4) is used as the sensor for determining the edge part of the conductive foil, in that the sensor light emitted onto the edge part of the conductive foil is received by a light receiving part (4b), in that the optical detector (4b) is subjected to motion control in the direction which orthogonally intersects the transport direction, such that the amount of light reception is constant and in that the area irradiated with the exposure light is moved by the same amount as the optical detector (4), and thus, the peripheral area is exposed. The length of the sensor light in the transport direction of the irradiation area on the film circuit board TP is determined by the pitch between the perforation holes multiplied by a natural number. In this way, the resist (R) of the peripheral area of the conductive foil can be exposed according to the edge position of the conductive foil.
申请公布号 US6515295(B1) 申请公布日期 2003.02.04
申请号 US20010886005 申请日期 2001.06.22
申请人 USHIODENKI KABUSHIKI KAISHA 发明人 SATO MASANORI;MURAKAMI SATOSHI
分类号 G03F7/20;G03F9/00;H05K1/00;H05K1/02;H05K3/00;(IPC1-7):G01N21/86 主分类号 G03F7/20
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