发明名称 MONOCHROMATOR AND SPECTROMETRIC METHOD
摘要 In the monochromator, when measured beam which is diffracted by a plane diffraction grating is collected by a collimator to be returned, the measured beam is displaced by a displacement member in a direction parallel to rulings of the plane diffraction grating and is passed through a first cut-off slit having a slit of a predetermined width formed in a direction perpendicular to the direction of the rulings.
申请公布号 CA2348568(C) 申请公布日期 2003.02.04
申请号 CA20012348568 申请日期 2001.05.25
申请人 ADVANTEST CORPORATION 发明人 TOKUMOTO, ISAO
分类号 G01J3/18;(IPC1-7):G01J3/18 主分类号 G01J3/18
代理机构 代理人
主权项
地址