| 摘要 |
An ionization vacuum gauge which can stably perform measurements of pressure in the intermediate vacuum to high vacuum regions, that is performed by an ionization-type first measurement element, as well as in the measurement region intrinsic to a second measurement element. This ionization vacuum gauge comprises a measurement element vessel, and first and second measurement parts provided within this measurement element vessel. The first measurement part comprises component electrodes including a filament, grid and ion collector, and is of an ionization-type construction for measurement of the pressure of vacuum states. The second measurement part is of a construction having different functions from those of the first measurement part, and is disposed in a space that is near the extension of the grid axis, and is away from the principal space for flying of thermal electrons emitted from the filament. A shield plate is provided between the second measurement part and the component electrodes, to spatially separate the second measurement part and the component electrodes. The second measurement part is fixed to an element fastening plate made from a material with excellent thermal conductivity.
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