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发明名称
摘要
申请公布号	JP2003504516(A)	申请公布日期	2003.02.04
申请号	JP20010509575	申请日期	2000.06.23
申请人		发明人
分类号	C23F13/00;C23F13/22;(IPC1-7):C23F13/00	主分类号	C23F13/00
代理机构		代理人
主权项
地址

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