Technique for determining curvatures of embedded line features on substrates

摘要

Techniques for evaluating curvatures in line features embedded in a different material layer formed on a substrate. A model based a uniform layer formed over a substrate may be used to represent a structure with parallel line features embedded in a layer formed over the substrate. The curvatures of the uniform layer due to an elastic distortion along a first direction substantially parallel to the line features and along a second direction orthogonal to the first direction are determined. Next, the curvatures of the uniform layer may be used as respective curvatures of each of the line features.