| 摘要 |
A testing head for microstructures is presented. The testing head includes a top guide plate and bottom guide plate, separated by an air gap. Each of the plates include respective guide holes for accommodating a contact probe having a contact tip that is arranged to mechanically and electrically contact a contact pads on a device under test. The contacting tip of the testing head has a non-zero pitch angle (alphaOUT) relative to the contact pad, and "scrubs" the pad as the device under test is drawn against the contacting tip, causing the contact probe to bend within the air gap.
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