Interferometric system for and method of testing and characterizing micro-optic components

摘要

Three aspect of a interferometer system for testing and characterizing micro-optical components an automatic system for testing a plurality of micro-optical components in sequence, a special holding device including a vacuum chuck arrangement allows for individual micro-optical components to be picked up and held during testing, and a modified Linnik objective is used with short coherent light and preferably a opaque reference sphere to carry out reflection tests on micro-optical component having at least one curved surface.