发明名称 Underfill applications using film technology
摘要 A method and apparatus are provided for assembling a semiconductor package. The invention uses a thin release film placed over package components in a mold cavity. The release film is drawn down over the assembled components and envelops the assembled components with an airtight seal around at least three sides for assisting and defining the flow of encapsulant into empty space between components. A mold compound is flowed into the empty space, assisted by vacuum or air pressure at the airtight seal. The release film is pulled up and away from the assembled components, permitting encapsulant to flow into the remainder of the mold cavity.
申请公布号 US6514797(B2) 申请公布日期 2003.02.04
申请号 US20010805915 申请日期 2001.03.15
申请人 MICRON TECHNOLOGY, INC. 发明人 CHEE TAY L.;SENG TOH K.;CHUA TAN K.
分类号 H01L21/56;(IPC1-7):H01L21/48;H01L21/44 主分类号 H01L21/56
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