发明名称 Method for finding the root cause of the failure of a faulty chip
摘要 A method for finding the root causes of the failure of a faulty chip. The faulty chip comprises at least one defect. First, a type-searching step for the defect according to a defect size and a defect type to respectively predict a failure type of a predicted failure region relative to the defect is performed. Then, an influenced-range-searching step for the defect according to a defect location to respectively predict a failure range of a predicted failure region relative to the defect is performed. Finally, the predicted failure region of the defect and a real failure region which was electronically failed and been identified by the faulty chip are compared. If the predicted failure generated from the defect is located in the real failure region, the defect is interpreted to be one of the root causes of the failure of the faulty chip.
申请公布号 US6516433(B1) 申请公布日期 2003.02.04
申请号 US20000575572 申请日期 2000.05.22
申请人 PROMOS TECHNOLOGIES INC.;MOSEL VITELIC, INC. 发明人 KOENIG GREGOR
分类号 H01L21/66;(IPC1-7):G01R31/28 主分类号 H01L21/66
代理机构 代理人
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