发明名称 METHOD AND DEVICE FOR DEVELOPMENT
摘要 PROBLEM TO BE SOLVED: To provide a development device and a development method which enable compactness, space saving and improvement of production efficiency. SOLUTION: A developer nozzle arm 9, a tubular member 20a and a tubular member 27a are provided movably in a scanning direction A and its reverse direction by means of an arm driving part 10 along a guide rail 8. The developer nozzle arm 9 is provided with a developer discharge nozzle 11 with a slit-like discharge opening. The developer discharge nozzle 11 is provided with a rinse liquid discharge nozzle 16 for development stop, and a gas blow-out nozzle 12 is fixed to the rear side of the scanning direction A. A control unit controls scanning of the developer discharge nozzle 11 with the arm driving part 10, the rinse liquid discharge nozzle 16 and the gas nozzle 12, discharge of developer from the developer discharge nozzle 11, discharge of rinse liquid from the rinse liquid discharge nozzle 16 and blow-out of gas from the gas nozzle 12.
申请公布号 JP2003031487(A) 申请公布日期 2003.01.31
申请号 JP20010220355 申请日期 2001.07.19
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 TAMADA OSAMU;SANADA MASAKAZU;TANAKA AKIKO;NAKANO KAYOKO
分类号 G03F7/30;B05B13/02;B05C5/00;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/30
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