| 摘要 |
PROBLEM TO BE SOLVED: To provide a PZT-based piezoelectric thin film element that is not affected by the conditions of piezoelectric thin film crystallizing heat treatment, can be manufactured without requiring strict control, and is highly oriented in (111)-orientation. SOLUTION: This piezoelectric thin film element is composed of a (111)-oriented Pt lower electrode and a (111)-oriented piezoelectric thin film formed on the electrode. At the time of manufacturing the element, the difference in lattice spacing between the electrode and thin film is adjusted to <=2% of the (111)-spacing of the electrode.
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