发明名称 APPARATUS AND METHOD FOR SIMULTANEOUSLY TESTING SEMICONCUDOTR DEVICE OR SEMICONDUCTOR WAFER
摘要 PROBLEM TO BE SOLVED: To provide an apparatus and a method for entirely testing a semiconductor device or a semiconductor wafer capable of constituting a low cost testing unit, easily executing a test and easily confirming a decision result of a non-defective product or a defective product at any time. SOLUTION: The apparatus for entirely testing the semiconductor device or the semiconductor wafer comprises a self-testing circuit mounted at the device 4A; a comparison deciding circuit 32 for testing the device by supplying an applied data signal and a clock signal as well as expected value data from a tester, comparing a test result with the expected value data and deciding whether the device is good or not; and a nonvolatile semiconductor memory cell 33 for storing the decided result.
申请公布号 JP2003031666(A) 申请公布日期 2003.01.31
申请号 JP20010211662 申请日期 2001.07.12
申请人 MITSUBISHI ELECTRIC CORP 发明人 NISHIMURA YASUMASA
分类号 G01R31/28;G01R31/3185;G01R31/3187;H01L21/66;H01L21/82;H01L21/822;H01L27/04;(IPC1-7):H01L21/822 主分类号 G01R31/28
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