| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for generating plasma, capable of reducing cutting amount of a window of a container for generating the plasma and prolonging the life time of the window, and suppressing occurrence of a dust in a chamber. SOLUTION: The apparatus for generating the plasma comprises the window 24 formed on the wall surface of the chamber 21 and consists of a dielectric or a semiconductor, a load unit 30 arranged along the outer surface of the window 24, and a power source 26a for supplying a power to the unit 30. In this case, the unit 30 has a plurality of combinations of electrical circuit elements 31, in each of which a conductor lie 32 and a capacitor 33 are connected in series. |
