摘要 |
Hall's microsensor has a semiconductor substrate (1) of mixed type of conductivity, on one of the sides of which the supply (2, 3, 4) and registering (5,6) contacts are machined in a suitable manner, so that the external magnetic field (9) applied parallel to the surface of the chip shall general Hall's high value voltage. The microsensor design overcomes some shortcomings, such as reduced magnetic sensitivity, parasite voltage at the output in the absence of magnetic field, and restricted opportunity for the miniaturization of the longitudinal size. 1 claim, 1 figure
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