METHOD AND PROGRAM FOR SCHEDULING SUBSTRATE TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To enhance throughput by making a plurality of treatment schedules previously and considering of the use schedule of a plurality of equivalent treating sections thereby quickening delivery of lot surely. SOLUTION: When a schedule is made prior to starting treatment for each lot actually, a plurality of schedules using all equivalent treating sections (pure water treating sections 21 and 29, chemical treatment sections 23 and 31) available depending on the recipe are made when a certain lot is fed and a schedule ending first is employed. The plurality of schedules are compared and a schedule where the lot is delivered earliest is employed. Since use schedule of the equivalent treating sections can be taken into account, delivery of lot can be quickened surely and throughput can be enhanced.