发明名称 HEAT TREATMENT APPARATUS FOR SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide an apparatus which can equalize the powers to be supplied to a plurality of lamps which constitute a light source for heating, and which can drive all the lamps near the rated output. SOLUTION: Between the lamps 28 and a light-incident window 14 of a heat treatment furnace 10, a group of lenses 44 which consists of a plurality of lenses 46 arranged two-dimensionally in parallel is interposed. Among the group of lenses, those disposed near the center are concave lenses, and a condensing degree of a plurality of lenses disposed around those near the center is made higher as gradually approaching toward the periphery.
申请公布号 JP2003031517(A) 申请公布日期 2003.01.31
申请号 JP20010219936 申请日期 2001.07.19
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 ITO SADAAKI
分类号 F27B17/00;F27D11/02;H01L21/26;(IPC1-7):H01L21/26 主分类号 F27B17/00
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