发明名称 GOLD WIRE BONDING METHOD, DEVICE AND SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To provide a method, a device and a system for gold wire bonding by which a gold wire is bonded at a lower temperature, especially at a room temperature defined as 25 deg.C. SOLUTION: The gold wire bonding device for bonding the gold wire 303 to a gold bonding pad 307 is provided with a holder 301 for supporting the gold wire 303, a source 309 of vibration for vibrating the holder 301 on frequencies below 200 kHz and on power below 1 W and a source 390 of pressure for pressing the holder 301 against the gold bonding pad 307.</p>
申请公布号 JP2003031606(A) 申请公布日期 2003.01.31
申请号 JP20020170867 申请日期 2002.06.12
申请人 AGILENT TECHNOL INC 发明人 CHEN KIM H;CHOI SOOJIN;CHAN CHUN YEE;NIGOS JOHNNY MONIS
分类号 H01L21/60;B23K20/00;H01L21/607;H01L23/49;(IPC1-7):H01L21/60 主分类号 H01L21/60
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