发明名称 |
GOLD WIRE BONDING METHOD, DEVICE AND SYSTEM |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method, a device and a system for gold wire bonding by which a gold wire is bonded at a lower temperature, especially at a room temperature defined as 25 deg.C. SOLUTION: The gold wire bonding device for bonding the gold wire 303 to a gold bonding pad 307 is provided with a holder 301 for supporting the gold wire 303, a source 309 of vibration for vibrating the holder 301 on frequencies below 200 kHz and on power below 1 W and a source 390 of pressure for pressing the holder 301 against the gold bonding pad 307.</p> |
申请公布号 |
JP2003031606(A) |
申请公布日期 |
2003.01.31 |
申请号 |
JP20020170867 |
申请日期 |
2002.06.12 |
申请人 |
AGILENT TECHNOL INC |
发明人 |
CHEN KIM H;CHOI SOOJIN;CHAN CHUN YEE;NIGOS JOHNNY MONIS |
分类号 |
H01L21/60;B23K20/00;H01L21/607;H01L23/49;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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