METHOD AND DEVICE FOR STOCKING PRODUCT

摘要

PROBLEM TO BE SOLVED: To provide a method for stocking products being processed, e.g. semiconductor wafers, under an environment of high cleanliness and a device for stocking products using that method. SOLUTION: Outside air is taken in and circulated through a stocker 1 for stocking a large number of products being processed, e.g. semiconductor wafers, by means of a circulation fan 2. The outside air introduced into the stocker 1 is filtered through a chemical removing filter 4 and a ULPA filter 3 thus bringing about an air circulating/conditioning system of high cleanliness in the stocker 1.