| 摘要 |
PROBLEM TO BE SOLVED: To facilitate various working and treatment processing and moreover to conduct them optimally. SOLUTION: An apparatus for working and treating an article comprises a vacuum tank 11, a reaction gas supply source 20, and a power supply source 30. The tank 11 changes an opening of an exhaust valve 13 during advancing of working and treating process of the article W to be treated, makes the pressure of reaction gas in the tank to change, and can suitably control the abundance ratio of active species in the plasma.
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