| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent displacement of a substrate when a stage body moves by relaxing deformation of the stage body. SOLUTION: The stage unit comprises a stage body 14 moving while holding a substrate, and a driver 32 for driving the stage body 14. A corrector corrects deformation of the stage body 14 caused by driving of the driver 32.</p> |
