| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that it is difficult to reduce leak current of a resistive field plate easily. SOLUTION: A resistive polysilicon field plate 6 is interposed between an anode electrode and an EQR electrode. The resistive field plate 6 comprises a first annular part 14 on the inner circumferential side, a second annular part 15 on the outer circumferential side, a plurality of trunk parts 16 between them, and branch parts 17 projecting laterally from respective trunk parts 16. The branch parts 17 are formed not to pass a steady current thus reducing leak current. |
