发明名称 DEFLECTOR AND MANUFACTURING METHOD OF THE SAME, AND CHARGED PARTICLE EXPOSING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a deflector forming a storing deflection field with small current which is stable against the temperature variation, slightly affected by eddy current, with small aberration depending on a geometric accuracy of a coil and a core, and to provide a manufacturing method of the same. SOLUTION: A magnetic tape lamination body is used as a core of a deflector. The positioning of a coil and the magnetic tape lamination body is carried out by using light formation method and electroforming. Further, the magnetic tape lamination body is positioned by using a resist pattern formed by lithography.</p>
申请公布号 JP2003031172(A) 申请公布日期 2003.01.31
申请号 JP20010214792 申请日期 2001.07.16
申请人 NIKON CORP 发明人 NAKANO KATSUSHI
分类号 G03F7/20;H01B13/00;H01F7/06;H01F7/20;H01J3/14;H01J37/147;H01J37/305;H01L21/027;(IPC1-7):H01J37/147 主分类号 G03F7/20
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