ELECTROSTATIC CHUCK WITH DIELECTRIC COATING

摘要

Generally, an electrostatic chuck (102) having a dielectric coating is provided. In one embodiment, an electrostatic chuck (102) includes a support surface (106), a mounting surface (222) disposed opposite the support surface and at least one side (220) separating the support surface and the mounting surface which defines a support body. One or more conductive members (208) are disposed within the support body to generate an electrostatic attraction between the body and a substrate disposed thereon. A dielectric coating (224) is disposed on the mounting surface of the support body to minimize undesired current leakage therethrough. Optionally, the dielectric coating may be additionally disposed on one or more of the sides and/or the support surface.