SCRIBING DEVICE FOR FRAGILE MATERIAL SUBSTRATE

摘要

A scribing device for a fragile material substrate,wherein a plurality of laser spots are formed so as to provide a plurality of peaks of strength distribution on the fragile material substrate along a predetermined scribing line,and intervals between the plurality of laser spots and intervals between the peaks of strength distribution of the laser spots are set according to the type of the fragile material substrate on which a scribing line is formed.