发明名称 TRANSISTOR AND METHOD FOR MAKING A TRANSISTOR ON A SIGE/SOI SUBSTRATE
摘要 The invention concerns a method for making a MOS transistor comprising the following steps: a) providing a substrate including a thin silicon layer (26), integral with an insulating support (14), and covered with a semiconductor material surface layer (28) having a crystal lattice parameter close to that of silicon; b) locally etching the surface layer to expose the silicon layer in at least a channel region; c) forming an insulated gate (50) above the silicon layer in the channel region, and forming a source and a drain on either side of the channel region, the source and the drain extending into the silicon layer and into the surface layer.
申请公布号 WO03009404(A2) 申请公布日期 2003.01.30
申请号 WO2002FR02523 申请日期 2002.07.16
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;JOLY, JEAN-PIERRE 发明人 JOLY, JEAN-PIERRE
分类号 H01L21/28;H01L21/336;H01L29/423;H01L29/49;H01L29/786 主分类号 H01L21/28
代理机构 代理人
主权项
地址