摘要 |
<p>A method of making a magnetorestrictive sensor (40) involves the deposition of a magnetorestrictive strip (42, 46, 48, 50) over a substrate (44), the deposition of an insulating layer (52) over the magnetorestrictive strip (42, 46, 48, 50), the etching of barber pole windows (53) through the insulating layer (52), the deposition of a conductive material (54) over the insulating layer (52) and into the barber windows (53), and the etching away of the conductive material (54) between the barber pole windows (53) so as to form barber poles (56). In this manner, the formation of the barber poles (56) is controlled by the windows (53) formed in the insulating layer.</p> |