300MM SINGLE STACKABLE FILM FRAME CARRIER

摘要

An interlockable film frame carrier (100) has central (106) and periphal (108) portions for securely storing a film frame (194) supporting a film (196), a semiconductor wafer (198) disposed on the film. The central portion (106) has structure for supporting the semiconductor wafer and for allowing access to a lower surface of the stored film frame. The peripheral portion (108) of the film frame carrier (100) includes structures for supporting a peripheral portion of the film frame and matable stacking members (103). When the film frame is stored, two film frame carriers are interlocked by mating the stacking members.