发明名称 |
Staggered torsional electrostatic combdrive and method of forming same |
摘要 |
A staggered torsional electrostatic combdrive includes a stationary combteeth assembly and a moving combteeth assembly with a mirror and a torsional hinge. The moving combteeth assembly is positioned entirely above the stationary combteeth assembly by a predetermined vertical displacement during a combdrive resting state. A method of fabricating the staggered torsional electrostatic combdrive includes the step of deep trench etching a stationary combteeth assembly in a first wafer. A second wafer is bonded to the first wafer to form a sandwich including the first wafer, an oxide layer, and the second wafer. A moving combteeth assembly is formed in the second wafer. The moving combteeth assembly includes a mirror and a torsional hinge. The moving combteeth assembly is separated from the first wafer by the oxide layer. The oxide layer is subsequently removed to release the staggered torsional electrostatic combdrive.
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申请公布号 |
US2003019832(A1) |
申请公布日期 |
2003.01.30 |
申请号 |
US20020076296 |
申请日期 |
2002.02.13 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
CONANT ROBERT A.;NEE JOCELYN T.;LAU KAM-YIN;MULLER RICHARD S. |
分类号 |
B81B3/00;B81C1/00;G02B26/08;(IPC1-7):C23F1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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