发明名称 FACILITIES CONNECTION BUCKET FOR PRE/FACILITATION OF WAFER FABRICATION EQUIPMENT
摘要 <p>A facilities connection locator is provided for use with a support apparatus for supporting manufacturing equipment. The facilities connection locator comprises a fluid tight bucket having a bottom surface, a plurality of side walls extending upwardly from the bottom surface, and a mounting mechanism adapted to mount the fluid tight bucket to the support apparatus so that the fluid tight bucket has a fixed position relative to the support apparatus in a x y and z axes. The facilities connection locator also comprises a fluid connection port, and may comprise a vacuum connection port surrounded by a fluid tight riser. A vacuum line connection may extend through the vacuum connection port and may have a locating flange located a predetermined distance from the connection-s top surface, such that coupling the locating flange to the riser fixes the height of the vacuum line connection relative to the top of the riser.</p>
申请公布号 WO2003009348(A2) 申请公布日期 2003.01.30
申请号 US2002022315 申请日期 2002.07.12
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