发明名称 PRODUCTION METHOD OF SEMICONDUCTOR DEVICE
摘要 <p>A gate insulation film (3) and a gate electrode (4a) are formed on a semiconductor substrate (1S) for the purpose of enhancing the electrical characteristics of a field effect transistor, and then impurities for forming the channel area (6) of the field effect transistor are introduced.</p>
申请公布号 WO2003009374(P1) 申请公布日期 2003.01.30
申请号 JP2002004255 申请日期 2002.04.26
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