发明名称 PRODUCTION METHOD OF SEMICONDUCTOR DEVICE
摘要 A gate insulation film (3) and a gate electrode (4a) are formed on a semiconductor substrate (1S) for the purpose of enhancing the electrical characteristics of a field effect transistor, and then impurities for forming the channel area (6) of the field effect transistor are introduced.
申请公布号 WO03009374(A1) 申请公布日期 2003.01.30
申请号 WO2002JP04255 申请日期 2002.04.26
申请人 HITACHI, LTD.;SAKAI, TAKESHI;SHIBA, KAZUYOSHI;KAMOHARA, SHIRO;NAKAJIMA, NOBUE;KURODA, KENICHI 发明人 SAKAI, TAKESHI;SHIBA, KAZUYOSHI;KAMOHARA, SHIRO;NAKAJIMA, NOBUE;KURODA, KENICHI
分类号 H01L21/8247;H01L21/336;H01L21/8238;H01L27/092;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/823;H01L21/824 主分类号 H01L21/8247
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