发明名称 |
Electrical circuit conductor inspection |
摘要 |
A first inspection functionality is provided to obtain information about a first attribute at a conductor location on an electrical circuit. A second inspection functionality is provided to obtain information about a second attribute at the conductor location. A combination of first attribute information and second attribute information is analyzed to determine an inspection attribute of the conductor at the conductor location. Attribute information may relate to one or more of: reflectance, fluorescence or height.
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申请公布号 |
US2003020905(A1) |
申请公布日期 |
2003.01.30 |
申请号 |
US20010032098 |
申请日期 |
2001.12.31 |
申请人 |
ORBOTECH LTD. |
发明人 |
SAVAREIGO NISSIM;MARKOV IGOR;ZEMER DAN |
分类号 |
G01N21/956;(IPC1-7):G01N21/00 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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