发明名称 Electrical circuit conductor inspection
摘要 A first inspection functionality is provided to obtain information about a first attribute at a conductor location on an electrical circuit. A second inspection functionality is provided to obtain information about a second attribute at the conductor location. A combination of first attribute information and second attribute information is analyzed to determine an inspection attribute of the conductor at the conductor location. Attribute information may relate to one or more of: reflectance, fluorescence or height.
申请公布号 US2003020905(A1) 申请公布日期 2003.01.30
申请号 US20010032098 申请日期 2001.12.31
申请人 ORBOTECH LTD. 发明人 SAVAREIGO NISSIM;MARKOV IGOR;ZEMER DAN
分类号 G01N21/956;(IPC1-7):G01N21/00 主分类号 G01N21/956
代理机构 代理人
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