THERMAL TREATMENT APPARATUS AND THERMAL TREATMENT METHOD

摘要

A thermal treatment apparatus capable of rapidly changing the thermal treatment temperature and providing a stable temperature in a large treatment temperature range. The thermal treatment apparatus includes a treatment chamber where an object to be treated is subjected to a thermal treatment, a fluid passage formed along an outer surface of the treatment chamber, heating means arranged on the fluid passage for the thermal treatment, fluid passing means for introducing fluid to be contact with the heating surface of the heating means while passing through the fluid passage, and control means for controlling the temperature and the flow rate of the fluid passing through the fluid passage during at least a certain period of thermal treatment.