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发明名称
Herstellung von einem selbstausrichtenden T-Gatter-Hemt
摘要
申请公布号
DE69034031(D1)
申请公布日期
2003.01.30
申请号
DE1990634031
申请日期
1990.11.30
申请人
HUGHES ELECTRONICS CORP., EL SEGUNDO
发明人
MISHRA, UMESH K.;THOMPSON, MARK A.;JELLOIAN, LINDA M.
分类号
H01L29/812;H01L21/28;H01L21/285;H01L21/335;H01L21/338;(IPC1-7):H01L21/335;H01L29/76
主分类号
H01L29/812
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