| 发明名称 |
Radiation hardened microcircuits |
| 摘要 |
A method of radiation hardening microcircuits including the steps of removing hydrogen from the microcircuit in a vacuum furnace and annealing in deuterium-containing forming gas.
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| 申请公布号 |
US2003022527(A1) |
申请公布日期 |
2003.01.30 |
| 申请号 |
US20010681894 |
申请日期 |
2001.06.21 |
| 申请人 |
DEVINE RODERICK A. B.;CHAVEZ JOSEPH R. |
发明人 |
DEVINE RODERICK A. B.;CHAVEZ JOSEPH R. |
| 分类号 |
H01L21/28;H01L21/30;H01L21/324;H01L23/552;(IPC1-7):H01L21/26;H01L21/322;H01L21/42;H01L21/477;H01L23/58 |
主分类号 |
H01L21/28 |
| 代理机构 |
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