| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum deposition system which is capable of forming a dense and high-quality film to a large area on a base material. SOLUTION: A cluster evaporation source 3 is used as an evaporation source for evaporating the raw material of the film. Electric power is supplied into a chamber 2 through a base material holder 5 for holding the base material 15 from a rear surface side, by which the clusters spouted from the cluster evaporation source 3 are cluster ionized and the film is formed on the base material 15.
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