| 摘要 |
PROBLEM TO BE SOLVED: To ensure the reliability of two detection electrodes without exposing the detection electrodes to external environment while realizing the constitution possible to miniaturize of a sensor main body, in a capacitive humidity sensor constituted so as to convert the change in capacity between two detection electrodes accompanied by a change in humidity to a voltage signal by an SC circuit to detect the same. SOLUTION: A silicon oxide film 20 is formed on the surface of a semiconductor substrate 10 and two detection electrodes 31 and 32 are formed on the silicon oxide film 20 in opposed relationship in a spaced-apart state to be covered with a humidity-sensitive film 50 through a silicon nitride film 40. A switched capacitor circuit(SC circuit) for converting the change in capacity value between two detection electrodes 31 and 32 to the voltage signal to output the same is integrated on the semiconductor substrate 10 and the reference capacity part 250 and feedback capacity part 260 of the SC circuit are provided under one detection electrode 32.
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