Stage system with onboard linear motor

摘要

Here is disclosed a stage system enabling position control of a tiny angle by virtue of a linear motor(13) and becoming greater in response ability, with even slimness and small size in construction. The stage system has a first stage(1) lying on a base stage(4) for linear movement in an X-direction relatively to the base stage(4), a second stage(2) lying on the first stage(1) for linear movement relatively to the first stage(1) in a Y-direction, a turning stage(3) lying on the second stage(2) to be supported through rolling bearing means(32) on the second stage(2), and a turning linear motor(13) for driving the turning stage(3) over a tiny amount of angle in either direction of rotation. The turning linear motor(13) is comprised of a primary side(34) of more than one armature winding arranged in juxtaposition in straight line on the second stage(2), and a secondary side(39) of field magnets arranged in juxtaposition in opposition to the armature winding on the turning stage(3), with magnetic poles alternating in polarity in straight line.