发明名称 METHOD FOR PRODUCING METAL MASK AND METAL MASK
摘要 A method for manufacturing a metal mask that facilitates easy dimensional control in the manufacturing process and can manufacture multiple metal masks having high and consistent precision. A Cr film 2 having a mask pattern 2 a is formed on the surface of a glass plate 1, a dry film 4 is formed on the Cr film 2, the dry film 4 is exposed from the glass plate 1 side with the Cr film 2 as a mask, a mask pattern 4 a having the same shape as that of the mask pattern 2 a is formed on the dry film 4, and a metal plating layer 6 is formed on the Cr film 2. The metal plating layer 6 is separated to form a metal mask 7.
申请公布号 KR20030009324(A) 申请公布日期 2003.01.29
申请号 KR20027006698 申请日期 2001.09.25
申请人 发明人
分类号 G03F1/68;C25D1/08;G03F7/00 主分类号 G03F1/68
代理机构 代理人
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