| 摘要 |
PROBLEM TO BE SOLVED: To obtain a practical electric chuck which can stably hold the object. SOLUTION: This electric chuck includes at least a pair of movable members (including a holding pawl) made mutually approachable and separable, a pair of driving gears respectively provided with an electric actuator to drive a pair of the movable members respectively in the direction of the approaching and separating, and a control device controlling a pair of these driving gears, the electric chuck moves the holding pawl by a position command exceeding an actual holding position (S13), stops the holding pawl in the point of time obtaining adequate grasp force by making the holding pawl abut to an electrical part (S17), sets this position to a new target (S18), and controls the holding pawl so as to maintain this target position (S20). |
