发明名称 MANUFACTURING METHOD FOR STRUCTURE USING HIGH ENERGY LIGHT SOURCE
摘要 PROBLEM TO BE SOLVED: To provide the manufacturing method of a structure using a high energy light source easily manufacturing not only a microlens but also an extremely small structure having a prescribed form by the exposure process of one time using the high energy light source such as an X ray and heat treatment. SOLUTION: By manufacturing a plurality of the microlenses having the same form by performing an injection molding or hot embossing process using a die for the microlens, the mass production of the microlenses is made possible. Also, in the case of using a laser as the high energy light source, since the exposure process is performed by exposing a laser light source to the photosensitive material of an area where the microlens is scheduled to be formed and irradiating it with a laser beam, the exposed photosensitive material surface is fused by the heat treatment and the microlens is formed, a mask can be omitted at the time of the exposure process.
申请公布号 JP2003029418(A) 申请公布日期 2003.01.29
申请号 JP20020007676 申请日期 2002.01.16
申请人 POHANG ENG COLLEGE 发明人 LEE SEUNG SEOB;LEE SUNG-KEUN;LEE KWANG-CHEOL
分类号 G03F7/20;G02B3/00;G03F7/00;G03F7/38;(IPC1-7):G03F7/20 主分类号 G03F7/20
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