Gas discharge laser

摘要

The gas discharge laser has a discharge tube (1) with at least one window for laser light output or deflection, at least one gas extraction point (9) for removing some of the gas, a sinter filter (11) for cleaning the extracted gas and at least one gas input point near the window for feeding in the gas cleaned by the filter. Independent claims are also included for the following: a method of operating an inventive device and the use of a sinter filter to clean the gas flow extracted from the discharge tube of a gas discharge laser.